ASML Autoloader by DWFritz Automation, Inc.
Related Technologies:
This machine automatically loads two different sized mask pods (six-reticle or single-reticle) onto the ASML PAS 5500 machine. It was designed to eliminate ergonomic issues with the loading and unloading of pods manually, as well as significantly decrease the risk of an operator dropping a pod while trying to load the machine.
An operator places the pod(s) onto one, two, or all three locations on the Autoloader. The operator then uses the touch screen to start the loading. The Autoloader senses any and all pods present on both the ASML and the Autoloader and makes the transfers that are available. The Autoloader will not transfer/unload a pod until the ASML has an unlocked signal present for that pod.
ITEMS OF NOTE:
- Machine design and custom graphical user interface based on input from operators, technicians, engineers, and ergonomic personnel.
- Designed to be CE certified, if necessary.
- Floor mounting designed for quick disconnect and easy roll away. Allows complete access to ASML tool for maintenance.
- The Autoloader has caster wheels on outriggers, so that a technician can quickly separate the autoloader from the ASML.
- Provided with separate test platform for maintenance away from ASML. No ASML down time due to Autoloader maintenance.
- The only integration requirements for install are a simple power source of 110-230VAC, 15 amps (machine auto-switches).
- Extends approximately 18 inches from the front of the ASML machine.
- Does not require hardwiring between Autoloader and the ASML.
- Integrated light curtain to protect the operator during pod loading/unloading.
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About DWFritz Automation, Inc.
DWFritz is a systems integrator/custom machine builder. We offer significant expertise in the area of designing and building sophisticated, custom, turnkey automation systems. Our staff has considerable experience with technologies such as: robotics machine vision (both low cost and high-performance) high speed and precision part assembly automated inspection and metrology MEMS assembly, inspection, and metrology medical device manufacturing solar manufacturing equipment micron-level precision ultra-precision servo control material handling wafer handling and inspection precision dispensing precision positioning/pick & place of dies onto wafers integration of off-the-shelf systems with custom equipment FDA CFR Part 11 Compliance