Classification:
Customers worldwide depend on ADE Technologies for solutions to their most demanding linear displacement measurement applications. ADE's dimensional gauging systems, based on patented capacitance sensing technology, are used to make very precise, high bandwidth measurements of precision products such as hard disk drive motors, air bearing spindles, precision X-Y stages, optical disks, automotive parts and machine tools. ADE's capacitance gauges provide the highest resolution in the industry, less than 0.05 nanometers, with virtually unlimited service life.
ADE capacitance sensors are ideal for linear position sensing and ultra-high resolution servo system feedback. Leading equipment manufacturers around the world use ADE capacitance sensors in wafer lithography systems, autofocus mechanisms, nanopositioning stages, metrology tools and flat panel display manufacturing equipment. Capacitive sensors provide sub-nanometer resolution at a fraction of the cost of laser distance measuring interferometers. Our high vacuum compatible capacitance sensors are ideal for linear position sensing in scanning electron microscope (SEM) and focused ion beam (FIB) systems.